9 Patents
- US125867482026Structure for Particle Acceleration and Charged Particle Beam Apparatus
Hitachi High-tech Corporation
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- US123945852025Electron Source, Electron Gun, and Charged Particle Beam Device
HITACHI HIGH-TECH CORPORATION
0 cites - 0 cites
- US121745512024Pattern Measurement Device and Pattern Measurement Method
Hitachi High-technologies Corporation
0 cites - 0 cites
- US116704792023Electron Microscope and Method of Adjusting Focus of Electron Microscope
HITACHI HIGH-TECH CORPORATION
0 cites - 0 cites
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