Patents/Inventors

Kenji Sekiguchi

YamanashiJP2 patents

3 Patents

US124068622025
Vacuum Processing Apparatus and Oxidizing Gas Removal Method
Tokyo Electron Limited
0 cites
US122030212025
Substrate Processing Device and Etching Liquid
TOKYO ELECTRON LIMITED
0 cites
US118655902024
Substrate Cleaning Method, Processing Container Cleaning Method, and Substrate Processing Device
Tokyo Electron Limited
0 cites