13 Patents
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- US124544912025Nitride Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
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- US119996152024Nitride Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites - US119689022024Piezoelectric Body and MEMS Device Using Same
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
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