Patents/Inventors

Kenji Funatsu

JoetsuJP2 patents

2 Patents

US124297722025
Chemically Amplified Resist Composition, Photomask Blank, Method for Forming Resist Pattern, and Method for Producing Polymer Compound
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US122711122025
Negative Resist Composition and Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites