Patents/Inventors

Kenichiro Aikawa

ShigaJP10 patents

10 Patents

US125384322026
Printed Wiring Board
SUMITOMO ELECTRIC PRINTED CIRCUITS, Inc.
0 cites
US122847292025
Ceramic Heater with Shaft
NGK INSULATORS, Ltd.
0 cites
US122305262025
Electrostatic Chuck Heater
NGK INSULATORS, Ltd.
0 cites
US121084992024
Ceramic Heater with Shaft
NGK INSULATORS, Ltd.
0 cites
US120876132024
Wafer Placement Table and Method of Manufacturing the Same
NGK INSULATORS, Ltd.
0 cites
US120273852024
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US119515832024
Electrostatic Chuck with High Insulation Performance and Electrostatic Attraction Force
NGK INSULATORS, Ltd.
0 cites
US119488252024
Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites
US118374902023
Electrostatic Chuck Heater
NGL INSULATORS, Ltd.
0 cites
US116107982023
Electrostatic Chuck Assembly, Electrostatic Chuck, and Focus Ring
NGK Insulators, Ltd.
0 cites