5 Patents
- US124889592025Coverage Calculating Method, Charged Particle Beam Writing Method, Coverage Calculating Device, Charged Particle Beam Writing Apparatus, and Computer-readable Storage Medium
Nuflare Technology, Inc.
0 cites - US119423052024Data Generation Method, Charged Particle Beam Irradiation Device, and Computer-readable Recording Medium
Nuflare Technology, Inc.
0 cites - US117893722023Writing Data Generating Method and Multi Charged Particle Beam Writing Apparatus
Nuflare Technology, Inc.
0 cites - US117748602023Writing Data Generating Method, Multi Charged Particle Beam Writing Apparatus, Pattern Inspecting Apparatus, and Computer-readable Recording Medium
Nuflare Technology, Inc.
0 cites - US117494992023Data Generation Method and Charged Particle Beam Irradiation Device
Nuflare Technology, Inc.
0 cites