Patents/Inventors

Kenichi Oikawa

JoetsuJP4 patents

5 Patents

US120726272024
Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US120504022024
Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US117622872023
Onium Salt Compound, Chemically Amplified Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US116933142023
Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US116626632023
Substrate Protective Film-forming Composition and Pattern Forming Process
Shin-etsu Chemical Co., Ltd.
0 cites