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Inventors
Kenichi Kato
Miyagi
JP
4 patents
4 Patents
US12394605
2025
Plasma Processing System and Edge Ring Replacement Method
TOKYO ELECTRON LIMITED
0 cites
US12097715
2024
Thermal Head and Thermal Printer
KYOCERA CORPORATION
0 cites
US12049090
2024
Thermal Head and Thermal Printer
KYOCERA CORPORATION
0 cites
US11901163
2024
Plasma Processing System and Edge Ring Replacement Method
TOKYO ELECTRON LIMITED
0 cites