Patents/Inventors

Kenichi Akazawa

TokyoJP5 patents

6 Patents

US123374382025
Break-in Processing Apparatus and Break-in Processing Method
EBARA CORPORATION
0 cites
US122371942025
Substrate Transporter and Substrate Processing Apparatus Including Substrate Transporter
EBARA CORPORATION
0 cites
USD10218322024
Elastic Membrane
EBARA CORPORATION
0 cites
USD09890122023
Elastic Membrane
EBARA CORPORATION
0 cites
USD09819692023
Elastic Membrane for Semiconductor Wafer Polishing Apparatus
EBARA CORPORATION
0 cites
USD09814592023
Retaining Ring for Substrate
EBARA CORPORATION
0 cites