Patents/Inventors

Kenetsu Yokogawa

TokyoJP4 patents

5 Patents

US124445812025
Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US122371742025
Etching Method
HITACHI HIGH-TECH CORPORATION
0 cites
US119159512024
Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US118428852023
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US116825422023
Plasma Processing Device
HITACHI HIGH-TECH CORPORATION
0 cites