Patents/Inventors

Keith Laurence Comendant

Fremont, CAUS1 patent

2 Patents

US119423512024
Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns
Lam Research Corporation
0 cites
US116642622023
Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns
Lam Research Corporation
0 cites