Patents/Inventors

Keith Gaff

Fremont, CAUS5 patents

6 Patents

US124513352025
Multi-plate Electrostatic Chucks with Ceramic Baseplates
Lam Research Corporation
0 cites
US122278402025
Substrate Support with Varying Depths of Areas Between Mesas and Corresponding Temperature Dependent Method of Fabricating
Lam Research Corporation
0 cites
US119675172024
Electrostatic Chuck with Ceramic Monolithic Body
Lam Research Corporation
0 cites
US119357762024
Electrostatically Clamped Edge Ring
Lam Research Corporation
0 cites
US118481772023
Multi-plate Electrostatic Chucks with Ceramic Baseplates
Lam Research Corporation
0 cites
US116519912023
Electrostatic Chuck Design for Cooling-gas Light-up Prevention
Lam Research Corporation
0 cites