Patents/Inventors

Keith Fox

Tigard, ORUS2 patents

3 Patents

US123851382025
Plasma-enhanced Deposition of Film Stacks
Novellus Systems, Inc.
0 cites
US123410022025
Low Stress Films for Advanced Semiconductor Applications
Lam Research Corporation
0 cites
US117464202023
PECVD Apparatus for In-situ Deposition of Film Stacks
Novellus Systems, Inc.
0 cites