Patents/Inventors

Keith Comendant

Fremont, CAUS1 patent

2 Patents

US123409892025
Electrostatic Edge Ring Mounting System for Substrate Processing
Lam Research Corporation
0 cites
US122372012025
Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns
Lam Research Corporation
0 cites