Keita Shouji

4 Patents

• US118994762024

  Method and Apparatus for Measuring Gas Flow

  TOKYO ELECTRON LIMITED

  0 cites
• US117422282023

  Substrate Processing Method and Substrate Processing System

  TOKYO ELECTRON LIMITED

  0 cites
• US115857172023

  Method for Calibrating Plurality of Chamber Pressure Sensors and Substrate Processing System

  Tokyo Electron Limited

  0 cites
• US115557552023

  Method of Calibrating Multiple Chamber Pressure Sensors

  TOKYO ELECTRON LIMITED

  0 cites