Keita Ichimura

4 Patents

• US126032532026

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium

  Kokusai Electric Corporation

  0 cites
• US125753472026

  Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US124513752025

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate Support

  Kokusai Electric Corporation

  0 cites
• US120401612024

  Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

  Kokusai Electric Corporation

  0 cites