8 Patents
- US123325672025Composition for Forming Silicon-containing Resist Underlayer Film, Patterning Process, and Silicon Compound
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - US121054202024Coating-type Composition for Forming Organic Film, Patterning Process, Polymer, and Method for Manufacturing Polymer
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - US118861182024Material for Forming Organic Film, Substrate for Manufacturing Semiconductor Device, Method for Forming Organic Film, Patterning Process, and Compound for Forming Organic Film
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - US118515302023Material for Forming Organic Film, Patterning Process, and Polymer
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - US116920662023Material for Forming Organic Film, Substrate for Manufacturing Semiconductor Device, Method for Forming Organic Film, Patterning Process, and Compound for Forming Organic Film
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - US116768142023Material for Forming Organic Film, Substrate for Manufacturing Semiconductor Apparatus, Method for Forming Organic Film, and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - US116356912023Composition for Forming Organic Film, Substrate for Manufacturing Semiconductor Device, Method for Forming Organic Film, Patterning Process, and Polymer
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites