Patents/Inventors

Keisuke Namiki

TokyoJP7 patents

8 Patents

US123810892025
Information Processing System, Information Processing Method, Program, and Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US121836422024
Film-thickness Measuring Method, Method of Detecting Notch Portion, and Polishing Apparatus
EBARA CORPORATION
0 cites
US121285232024
Polishing Apparatus
EBARA CORPORATION
0 cites
US120681892024
Elastic Membrane, Substrate Holding Device, and Polishing Apparatus
EBARA CORPORATION
0 cites
US119698582024
Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US119581632024
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, and Method for Replacing Elastic Membrane
EBARA CORPORATION
0 cites
US117453062023
Polishing Apparatus and Method of Controlling Inclination of Stationary Ring
EBARA CORPORATION
0 cites
US117312352023
Polishing Apparatus and Polishing Method
EBARA CORPORATION
0 cites