Patents/Inventors

Keiji Hirabayashi

TokyoJP2 patents

3 Patents

US124114262025
Substrate Holding Board, Manufacturing Method of Device, and Exposure Device
Canon Kabushiki Kaisha
0 cites
US124009062025
Wafer Chuck, Method for Producing the Same, and Exposure Apparatus
Canon Kabushiki Kaisha
0 cites
US118429182023
Wafer Chuck, Method for Producing the Same, and Exposure Apparatus
Canon Kabushiki Kaisha
0 cites