Patents/Inventors

Keiichi Tanaka

San Jose, CAUS8 patents

7 Patents

US124313612025
Self-aligned Double Patterning with Spatial Atomic Layer Deposition
Applied Materials, Inc.
0 cites
US120787632024
Radiation Analysis System, Charged Particle Beam System, and Radiation Analysis Method
Hitachi High-tech Corporation
0 cites
US118878182024
Methods and Systems to Modulate Film Stress
Applied Materials, Inc.
0 cites
US117682992023
Radiation Analyzer
Hitachi High-tech Corporation
0 cites
US116922672023
Plasma Induced Modification of Silicon Carbide Surface
Applied Materials, Inc.
0 cites
US116933192023
Substrate Processing Method, Substrate Processing Apparatus, and Storage Medium
TOKYO ELECTRON LIMITED
0 cites
US115812132023
Susceptor Wafer Chucks for Bowed Wafers
APPLIED MATERIALS, Inc.
0 cites