Patents/Inventors

Kei-wei Chen

TainanTW76 patents

72 Patents

US126222452026
Ion Implant Process for Defect Elimination in Metal Layer Planarization
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US125687862026
Processing Tool and Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125506952026
Methods of Forming an Abrasive Slurry and Methods for Chemical-mechanical Polishing
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US125458102026
Magnetic Polishing Slurry and Method for Polishing a Workpiece
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US125435242026
Chemical Mechanical Polishing Cleaning System with Temperature Control for Defect Reduction
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US125074582025
Semiconductor Device with Dielectric Spacer Liner on Source/drain Contact
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US124647902025
Semiconductor Structure
NATIONAL CHENG KUNG UNIVERSITY
0 cites
US124475802025
Apparatus and Methods for Chemical Mechanical Polishing
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124276182025
Chemical-mechanical Planarization Pad and Methods of Use
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US124244492025
CMP System and Method of Use
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123622012025
Bevel Edge Removal Methods, Tools, and Systems
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123590902025
Composition and Method for Polishing and Integrated Circuit
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US123277342025
Chemical Mechanical Polish Slurry and Method of Manufacture
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123251022025
Chemical Mechanical Polishing Apparatus and Method
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123114952025
Temperature Control in Chemical Mechanical Polish
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123005082025
Chemical Mechanical Polishing Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US122973752025
Slurry Composition and Method for Polishing and Integrated Circuit
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US122939172025
System and Method for Removing Impurities During Chemical Mechanical Planarization
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122495422025
Semiconductor Device Structure with an Interconnect Structure in a Dielectric Layer with Multiple Hydrophobic Layers Along Sidewalls of the Dielectric Layer, and Method for Forming the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US122294872025
Hotspot Avoidance Method of Manufacturing Integrated Circuits
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122245472025
Laser Device and Method of Using the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US122241792025
Metal Heterojunction Structure with Capping Metal Layer
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122118432025
Manufacturing Method of Fin-type Field Effect Transistor Structure
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US121722632024
Chemical Mechanical Planarization Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121599252024
Semiconductor Device and Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121583322024
Thin Film Metrology
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US121318962024
Method for Wafer Backside Polishing
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US121319442024
Slurry Composition, Semiconductor Structure and Method for Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US121321072024
Semiconductor Structure and Methods of Forming Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US121284552024
Electrical Cleaning Tool for Wafer Polishing Tool System
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120875902024
Self-healing Polishing Pad
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120681952024
Metal Loss Prevention Using Implantation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120681962024
Forming Gate Line-end of Semiconductor Structures with Improved Metal Gate Height
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120681692024
Semiconductor Processing Tool and Methods of Operation
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120466612024
Fin-type Field Effect Transistor
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120366362024
Mega-sonic Vibration Assisted Chemical Mechanical Planarization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120301592024
Chemical Mechanical Planarization Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120211172024
Semiconductor Structure and Method of Forming the Same
NATIONAL CHENG KUNG UNIVERSITY
0 cites
US120028542024
Semiconductor Device and Method of Manufacture
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120026842024
Methods for Chemical Mechanical Polishing and Forming Interconnect Structure
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US119919362024
Method of Forming a Finfet Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119843232024
CMP System and Method of Use
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119643582024
Chemical Mechanical Polishing Apparatus and Method
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US119515872024
Zone-based CMP Target Control
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119293982024
Finfet Structure and Method for Manufacturing Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US119044302024
Temperature Control in Chemical Mechanical Polish
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118548272023
Magnetic Slurry for Highly Efficiency CMP
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118548722023
Semiconductor Device Structure with Interconnect Structure and Method for Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118549012023
Semiconductor Method and Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118507042023
Methods to Clean Chemical Mechanical Polishing Systems
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117722282023
Chemical Mechanical Polishing Apparatus Including a Multi-zone Platen
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117617512023
Thin Film Metrology
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117282152023
Fin Field-effect Transistor Device and Method of Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117281722023
Wafer Thinning Apparatus Having Feedback Control
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117188122023
Post-cmp Cleaning Composition for Germanium-containing Substrate
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117127782023
Chemical Mechanical Planarization Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117106592023
Metal Loss Prevention Using Implantation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116948892023
Chemical Mechanical Polishing Cleaning System with Temperature Control for Defect Reduction
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116850132023
Polishing Pad for Chemical Mechanical Planarization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116794692023
Chemical Mechanical Planarization Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116759532023
Hotspot Avoidance Method of Manufacturing Integrated Circuits
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116706902023
Semiconductor Device with Dielectric Spacer Liner on Source/drain Contact
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116642132023
Bevel Edge Removal Methods, Tools, and Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116580652023
Chemical Mechanical Polishing Slurry Composition, Method for Chemical Mechanical Polishing and Method for Forming Connecting Structure
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US116370212023
Metal Heterojunction Structure with Capping Metal Layer
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116338292023
External Heating System for Use in Chemical Mechanical Polishing System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116316182023
Thickness Sensor for Conductive Features
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116213422023
Semiconductor Device, Method, and Tool of Manufacture
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115906272023
Mega-sonic Vibration Assisted Chemical Mechanical Planarization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115946802023
Method of Forming a Finfet Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115693872023
Semiconductor Device Including Fin Structures and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US115519362023
Self-healing Polishing Pad
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites