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Inventors
Kei Shibayama
Ibaraki
JP
2 patents
3 Patents
US12211665
2025
Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites
US11946858
2024
Examination Device
HITACHI HIGH-TECH CORPORATION
0 cites
US11929231
2024
Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites