Patents/Inventors

Kazuya Nagaseki

MiyagiJP15 patents

16 Patents

US125371682026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125371722026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124943492025
Member, Manufacturing Method of Member and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124244242025
Plasma Monitoring System, Plasma Monitoring Method, and Monitoring Device
Tokyo Electron Limited
0 cites
US123225782025
Exhaust Device, Processing Apparatus, and Exhausting Method
Tokyo Electron Limited
0 cites
US122886762025
Stage and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US122550492025
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US121868982025
Part Transporting Device and Processing System
TOKYO ELECTRON LIMITED
0 cites
US121547932024
Etching Apparatus and Etching Method
TOKYO ELECTRON LIMITED
0 cites
US120875912024
Plasma Processing Apparatus and System
TOKYO ELECTRON LIMITED
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US120338322024
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119819932024
Forming Method of Component and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US119674872024
Forming Method of Component and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119190322024
Film Forming Apparatus and Method for Manufacturing Part Having Film Containing Silicon
TOKYO ELECTRON LIMITED
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US116995732023
Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US116134322023
Processing System and Method Using Transporting Device Facilitating Replacement of Consumable Part
TOKYO ELECTRON LIMITED
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