Patents/Inventors

Kazuya Kijima

TochigiJP1 patent

2 Patents

US122418462025
Detection Apparatus, Detection Method, Exposure Apparatus, Exposure System, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US118354702023
Detection Apparatus, Detection Method, Exposure Apparatus, Exposure System, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites