Kazuya Hisano

6 Patents

• US122305402025

  Substrate Processing System and Substrate Processing Method

  Tokyo Electron Limited

  0 cites
• US121911682025

  Laser Processing Device, Laser Processing System and Laser Processing Method

  Tokyo Electron Limited

  0 cites
• US120875882024

  Substrate Processing Apparatus and Substrate Processing Method

  Tokyo Electron Limited

  0 cites
• US118239222023

  Substrate Inspection Apparatus, Substrate Processing Apparatus, Substrate Inspection Method, and Computer-readable Recording Medium

  TOKYO ELECTRON LIMITED

  0 cites
• US116699552023

  Substrate Defect Inspection Method, Storage Medium, and Substrate Defect Inspection Apparatus

  Tokyo Electron Limited

  0 cites
• US116095022023

  Substrate Inspection Apparatus, Substrate Processing Apparatus, Substrate Inspection Method, and Computer-readable Recording Medium

  TOKYO ELECTRON LIMITED

  0 cites