Kazuya Dobashi

6 Patents

• US121721982024

  Gas Cluster Processing Device and Gas Cluster Processing Method

  IWATANI CORPORATION

  0 cites
• US121658482024

  Substrate Processing Method, Substrate Processing Apparatus, and Method for Producing Nanowire or Nanosheet Transistor

  Tokyo Electron Limited

  0 cites
• US118655902024

  Substrate Cleaning Method, Processing Container Cleaning Method, and Substrate Processing Device

  Tokyo Electron Limited

  0 cites
• US117721382023

  Processing Apparatus and Processing Method, and Gas Cluster Generating Apparatus and Gas Cluster Generating Method

  TOKYO ELECTRON LIMITED

  0 cites
• US117610752023

  Substrate Cleaning Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US116948722023

  Pattern Enhancement Using a Gas Cluster Ion Beam

  TEL Manufacturing And Engineering Of America, Inc.

  0 cites