Patents/Inventors

Kazuumi Tanaka

TokyoJP3 patents

3 Patents

US119553602024
Electrostatic Chuck and Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
USD10089862023
Ion Shield Plate for Plasma Processing Apparatus
Hitachi High-tech Corporation
0 cites
US117106192023
Vacuum Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites