Patents/Inventors

Kazuteru Obara

IwateJP4 patents

5 Patents

US121964922025
Heat Treatment Apparatus and Heat Treatment Method
Tokyo Electron Limited
0 cites
US117840702023
Heat Treatment Apparatus, Heat Treatment Method, and Film Forming Method
TOKYO ELECTRON LIMITED
0 cites
US116742242023
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116561262023
Heat Treatment Apparatus and Temperature Control Method
TOKYO ELECTRON LIMITED
0 cites
US115812012023
Heat Treatment Apparatus and Film Deposition Method
TOKYO ELECTRON LIMITED
0 cites