Patents/Inventors

Kazushi Kaneko

YamanashiJP5 patents

6 Patents

US124127322025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US121911162025
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US118878162024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117215242023
Power Generation Systems and Methods for Plasma Stability and Control
Tokyo Electron Limited
0 cites
US115877692023
Microwave Output Device and Plasma Processing Apparatus
TOKYO KEIKI Inc.
0 cites
US115690682023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites