Patents/Inventors

Kazuo Yabe

YamanashiJP2 patents

3 Patents

US124380552025
Abnormality Detection Method and Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119231772024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117812192023
Processing Apparatus and Processing Method
TOKYO ELECTRON LIMITED
0 cites