Patents/Inventors

Kazunori Shinoda

TokyoJP4 patents

5 Patents

US124446182025
Etching Method and Etching Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US122371742025
Etching Method
HITACHI HIGH-TECH CORPORATION
0 cites
US120515742024
Wafer Processing Method and Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US119159512024
Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US115574632023
Vacuum Processing Apparatus
Hitachi High-tech Corporation
0 cites