Patents/Inventors

Kazumasa Igarashi

YamanashiJP4 patents

4 Patents

US125884402026
Substrate Processing Method and Substrate Processing Apparatus for Etching Using Oxidization
Tokyo Electron Limited
0 cites
US120805172024
Ignition Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119231772024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117812192023
Processing Apparatus and Processing Method
TOKYO ELECTRON LIMITED
0 cites