12 Patents
- US124697162025Plasma Etching Method and Method for Manufacturing Semiconductor Element
Resonac Corporation
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- US124068542025Dry Etching Method, Production Method for Semiconductor Element, and Cleaning Method
Resonac Corporation
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- US120149292024Etching Method for Silicon Nitride and Production Method for Semiconductor Element
Resonac Corporation
0 cites - US119729552024Dry Etching Method, Method for Manufacturing Semiconductor Element, and Cleaning Method
Resonac Corporation
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- US117798772023Method for Removing Halogen Fluoride, Quantitative Analysis Method for Gas Component Contained in Halogen Fluoride Mixed Gas, and Quantitative Analyzer
Resonac Corporation
0 cites - US116562192023Apparatus and Method for Storing Thin Film Device and Method for Measuring Biological Molecule
Hitachi High-technologies Corporation
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