Patents/Inventors

Kazuki Moyama

MiyagiJP7 patents

8 Patents

US124630252025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US124566132025
Plasma Processing System, Plasma Processing Apparatus, and Method for Replacing Edge Ring
TOKYO ELECTRON LIMITED
0 cites
US124513272025
Apparatus for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US123225782025
Exhaust Device, Processing Apparatus, and Exhausting Method
Tokyo Electron Limited
0 cites
US121868982025
Part Transporting Device and Processing System
TOKYO ELECTRON LIMITED
0 cites
US117215242023
Power Generation Systems and Methods for Plasma Stability and Control
Tokyo Electron Limited
0 cites
US116995732023
Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US116134322023
Processing System and Method Using Transporting Device Facilitating Replacement of Consumable Part
TOKYO ELECTRON LIMITED
0 cites