3 Patents
- US124733092025Organometallic Compound and Method of Manufacturing Integrated Circuit Using the Same
ADEKA CORPORATION
0 cites - US123782722025Yttrium Compound and Method of Manufacturing Integrated Circuit Device by Using the Same
ADEKA CORPORATION
0 cites - US117461212023Molybdenum Compound and Method of Manufacturing Integrated Circuit Device Using the Same
ADEKA CORPORATION
0 cites