Patents/Inventors

Kazuhito Yamada

MiyagiJP5 patents

5 Patents

US126147032026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125623542026
Plasma Processing Apparatus and Temperature Controlling Method
TOKYO ELECTRON LIMITED
0 cites
US124244162025
Substrate Processing Apparatus and Parameter Acquisition Method
TOKYO ELECTRON LIMITED
0 cites
US122008262025
Substrate Processing Apparatus and Noise Impact Reducing Method
TOKYO ELECTRON LIMITED
0 cites
US115811682023
Plasma Processing Apparatus and Method
TOKYO ELECTRON LIMITED
0 cites