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Inventors
Kazuhisa Torigoe
Tokyo
JP
2 patents
3 Patents
US12142645
2024
Silicon Wafer and Manufacturing Method of the Same
SUMCO CORPORATION
0 cites
US11888036
2024
Method for Setting a Nitrogen Concentration of a Silicon Epitaxial Film in Manufacturing an Epitaxial Silicon Wafer
SUMCO CORPORATION
0 cites
US11695048
2023
Silicon Wafer and Manufacturing Method of the Same
SUMCO CORPORATION
0 cites