13 Patents
- US125884542026Aln Ceramic Substrate and Heater for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites - US125819042026Cooling Plate and Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
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- US121989652025Member for Semiconductor Manufacturing Apparatus, Method for Manufacturing the Same, and Mold
NGK INSULATORS, Ltd.
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