9 Patents
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- US122756932025Onium Salt, Chemically Amplified Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - US122164012025Sulfonium Salt, Chemically Amplified Resist Composition, and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
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- US116870002023Sulfonium Compound, Chemically Amplified Resist Composition, and Patterning Process
Shin-etsu Chemical Co., Ltd.
0 cites - US115603552023Onium Salt, Chemically Amplified Resist Composition, and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites