4 Patents
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- US120259112024Reflective Structure, Reflective Mask Blank, Reflective Mask and Method of Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites - US118993562024Reflective Film Coated Substrate, Mask Blank, Reflective Mask, and Semiconductor Device Manufacturing Method
HOYA CORPORATION
0 cites - US116812142023Substrate with a Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask and Method of Manufacturing Semiconductor Device
HOYA Corporation
0 cites