Patents/Inventors

Kazuhide Hasebe

NirasakiJP2 patents

3 Patents

US123593082025
Film Forming Method and Semiconductor Production Apparatus
Tokyo Electron Limited
0 cites
US122886712025
Film Deposition Apparatus for Fine Pattern Forming
Tokyo Electron Limited
0 cites
US118813792024
Film Deposition Apparatus for Fine Pattern Forming
Tokyo Electron Limited
0 cites