Patents/Inventors

Kazuaki Mukai

TokyoJP1 patent

2 Patents

US123848632025
Polymer, Resist Composition, Method for Manufacturing Substrate Having Pattern Formed Therein, and (meth)acrylic Ester and Production Method Therefor
Mitsubishi Chemical Corporation
0 cites
US118458222023
Polymer, Resist Composition, Method for Manufacturing Substrate Having Pattern Formed Therein, and (meth) Acrylic Ester and Production Method Therefor
Mitsubishi Chemical Corporation
0 cites