Patents/Inventors

Kazuaki Kozasa

TokyoJP1 patent

2 Patents

US116285342023
Silicon Wafer Single-side Polishing Method
SUMCO CORPORATION
0 cites
US115544582023
Polishing Head, Wafer Polishing Apparatus Using the Same, and Wafer Polishing Method Using the Same
SUMCO CORPORATION
0 cites