Patents/Inventors

Kaustuve Bhattacharyya

VeldhovenNL13 patents

15 Patents

US124293282025
Metrology Method, Target and Substrate
ASML NETHERLANDS B.V.
0 cites
US122769212025
Substrate Comprising a Target Arrangement, and Associated at Least One Patterning Device, Lithographic Method and Metrology Method
ASML Netherlands B.V.
0 cites
US122048262025
Method and Apparatus for Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites
US121893052025
Metrology Method and Apparatus and Computer Program
ASML Netherlands B.V.
0 cites
US121893142025
Metrology Method and Associated Metrology and Lithographic Apparatuses
ASML NETHERLANDS B.V.
0 cites
US121584352024
Illumination and Detection Apparatus for a Metrology Apparatus
ASML NETHERLANDS B.V.
0 cites
US121302462024
Method for Overlay Metrology and Apparatus Thereof
ASML Netherlands B.V.
0 cites
US120614212024
Method and System for Determining Information About a Target Structure
ASML Netherlands B.V.
0 cites
US120322972024
Method for Monitoring Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US120322992024
Metrology Method and Associated Metrology and Lithographic Apparatuses
ASML NETHERLANDS B.V.
0 cites
US120136472024
Metrology Method
ASML NETHERLANDS B.V.
0 cites
US118861252024
Method for Inferring a Local Uniformity Metric
ASML NETHERLANDS B. V.
0 cites
US117037722023
Recipe Selection Based on Inter-recipe Consistency
ASML NETHERLANDS B.V.
0 cites
US116401162023
Metrology Method, Computer Product and System
ASML NETHERLANDS B.V.
0 cites
US115802742023
Method and Apparatus for Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites