Patents/Inventors

Kaustubh Kale

Chelmsford, MAUS2 patents

3 Patents

US124870152025
Semiconductor Wafer Temperature Control Apparatus
Edwards Vacuum LLC
0 cites
US124806942025
Connecting and Disconnecting a Cooling Loop from a Refrigeration System
Edwards Vacuum LLC
0 cites
US121811912024
Pressure Regulated Semiconductor Wafer Cooling Apparatus and Method and a Pressure Regulating Apparatus
Edwards Vacuum LLC
0 cites