Patents/Inventors

Katsuyuki Koizumi

MiyagiJP9 patents

11 Patents

US123548902025
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122939032025
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US119357292024
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US118374802023
Temperature Controlling Apparatus, Temperature Controlling Method, and Placing Table
TOKYO ELECTRON LIMITED
0 cites
US117911772023
Placing Table Including Heat Exchange Medium Path and Substrate Processing Apparatus Thereof
TOKYO ELECTRON LIMITED
0 cites
US117840662023
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117568062023
Heater Power Feeding Mechanism
TOKYO ELECTRON LIMITED
0 cites
US117353922023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117354442023
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117053472023
Thermal Regulator, Substrate Processing Apparatus, and Method of Controlling Temperature of Stage
TOKYO ELECTRON LIMITED
0 cites
US116948812023
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites