Patents/Inventors

Katsuya Akiyama

KyotoJP2 patents

3 Patents

US119214262024
Substrate Processing Method, Substrate Processing Apparatus, and Recipe Selection Method
SCREEN Holdings Co., Ltd.
0 cites
US118726052024
Substrate Processing Method and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US115437522023
Substrate Processing Method, Substrate Processing Apparatus, and Recipe Selection Method
SCREEN Holdings Co., Ltd.
0 cites