Patents/Inventors

Katsuaki Nishikori

TokyoJP7 patents

7 Patents

US125608662026
Radiation-sensitive Resin Composition, Method of Forming Resist Pattern, Polymer, and Compound
JSR CORPORATION
0 cites
US123728692025
Method for Forming Resist Pattern and Radiation-sensitive Resin Composition
JSR CORPORATION
0 cites
US122596532025
Radiation-sensitive Resin Composition, Method of Forming Resist Pattern, and Compound
JSR CORPORATION
0 cites
US120929572024
Radiation-sensitive Resin Composition, Method for Forming Resist Pattern and Compound
JSR CORPORATION
0 cites
US119661612024
Radiation-sensitive Resin Composition, Method of Forming Resist Pattern, and Compound
JSR CORPORATION
0 cites
US116094952023
Radiation-sensitive Resin Composition and Resist Pattern-forming Method
JSR CORPORATION
0 cites
US115927462023
Radiation-sensitive Resin Composition, Resist Pattern-forming Method, Compound and Method of Generating Acid
JSR CORPORATION
0 cites