5 Patents
- US121069652024Methods for Forming a Metallic Film on a Substrate by Cyclical Deposition and Related Semiconductor Device Structures
ASM IP Holding B.V.
0 cites - US119591712024Methods of Forming a Transition Metal Containing Film on a Substrate by a Cyclical Deposition Process
ASM IP Holding B.V.
0 cites - US119526582024Cyclic Deposition Methods for Forming Metal-containing Material and Films and Structures Including the Metal-containing Material
ASM IP Holding B.V.
0 cites - US118147152023Cyclic Deposition Methods for Forming Metal-containing Material and Films and Structures Including the Metal-containing Material
ASM IP Holding B.V.
0 cites