Patents/Inventors

Kate Abel

Austin, TXUS12 patents

5 Patents

US126159832026
Methods for Wet Atomic Layer Etching of Silicon Dioxide
Tokyo Electron Limited
0 cites
US126046822026
Methods for Patterning a Semiconductor Substrate Using Metalate Salt Ionic Liquid Crystals
Tokyo Electron Limited
0 cites
US125060112025
Methods for Wet Atomic Layer Etching of Transition Metal Oxide Dielectric Materials
Tokyo Electron Limited
0 cites
US125060142025
Methods for Non-isothermal Wet Atomic Layer Etching
Tokyo Electron Limited
0 cites
US123983242025
Methods for Controlling the Pitch of Self-assembled Ionic Liquid Crystal (ILC) Structures
Tokyo Electron Limited
0 cites